Download Acoustic Wave and Electromechanical Resonators: Concept to by Humberto Campanella PDF

By Humberto Campanella

This groundbreaking e-book offers you a accomplished figuring out of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical approach) resonators. For the 1st time wherever, you discover broad assurance of those units at either the expertise and alertness degrees. This sensible reference provides you with suggestions in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the combination of those units with common CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF structures. in addition, this one-stop source appears to be like on the major features, transformations, and obstacles of FBAR, MEMS, and NEMS units, assisting you to settle on the ideal ways on your initiatives. Over 280 illustrations and greater than a hundred thirty equations aid key subject matters through the publication.

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Extra info for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

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While longitudinal modes have a pattern with their nodes located axially along the length of the cavity, transverse modes, with nodes located perpendicular to the axis of the cavity, may also exist. A transverse or shear-mode wave propagates and transfers its energy in the direction perpendicular to the oscillations occurring in the medium. 4. Shear-mode resonance occurs at longer wavelengths than longitudinal-mode vibrations. Another type of complex quasi-surface wave is the Lamb waves propagating in solid plates.

9 Ferromagnetic actuation of a MEMS cantilever. 16 MEMS and NEMS Resonator Technologies tance and time. 23) The spring constant k of the MEMS/NEMS resonator, along with its dimensions and geometry, imposes the mechanical conditions leading the structure to resonate at a certain frequency. 10 shows a quad-beam MEMS resonator with a NdFeB permanent magnet attached to it. The structure resonates at a frequency of 270 Hz when an AC current induces the external magnetic field. A coil placed underneath the resonator generates the current.

A MEMS prototype can now be fabricated. Different test and de-embedding structures are used at this stage to extract the resonator material constants, quality factor, equivalent-circuit parameters, insertion losses, and parasitic impedances. Fabricated devices are then characterized with available measurement instrumentation. The main characterization results are the resonance frequency and the quality factor, whose values will validate our design or will force us to redesign the resonator to reach the design values.

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