By Humberto Campanella
This groundbreaking e-book offers you a accomplished figuring out of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical approach) resonators. For the 1st time wherever, you discover broad assurance of those units at either the expertise and alertness degrees. This sensible reference provides you with suggestions in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the combination of those units with common CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF structures. in addition, this one-stop source appears to be like on the major features, transformations, and obstacles of FBAR, MEMS, and NEMS units, assisting you to settle on the ideal ways on your initiatives. Over 280 illustrations and greater than a hundred thirty equations aid key subject matters through the publication.